Microelectromechanical Systems - Materials and Devices IV: Volume 1299 (Paperback)

Part I. Material Development and Optimization: 1. Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers Jane Wang; 2. Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy Churamani Gaire; 3. Gold in flux-less bonding: noble or not noble Marco Balucani; 4. Giant piezoresistive variation of metal particles dispersed in PDMS matrix Stefano Stassi; 5. Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications J. Justice; 6. Transport model for microfluidic device for cell culture and tissue development Niraj Inamdar; 7. Refractive index memory effect of ferroelectric materials by domain control Kazuhiko Inoue; 8. Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission Masato Uehara; 9. Improving PZT thin film texture through Pt metallization and seed layers Luz Sanchez; Part II. Process Integration: 10. Patterning nanomaterials on fragile micromachined structures using electron beam lithography Srikar Vengallatore; 11. Pt/TiO2 growth templates for enhanced PZT films and MEMS devices Daniel Potrepka; 12. Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C Joumana El-Rifai; 13. PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process Naoto Kochi; 14. Reliability and stability of thin-film amorphous silicon MEMS on glass substrates Pedro Sousa; 15. High yield polymer MEMS process for CMOS/MEMS integration V. Seena; 16. Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates Xuelian Zhao; Part III. Micro- and Nanosensors: 17. A picowatt energy harvester Joseph Evans; 18. Mechanical and material characterization of bilayer microcantilever-based IR detectors Xin Zhang; 19. Film conductivity controlled variation of the amplitude distribution of high-temperature resonators Silja Schmidtchen; 20. Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport Zeinab Sanaee; 21. Development of a robust design for wet etched co-integrated pressure sensor systems Reinhart Job; 22. SU8/modified MWNT composite for piezoresistive sensor application V. Seena; 23. Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates Alexandra Gualdino; 24. Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite Allison Hess; Part IV. Material and Device Reliability: 25. Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures Enrique Escobedo-Cousin; 26. Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing Reiko Hiruta; 27. Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks Maurizio Gullo; 28. Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading Kuo-Shen Chen; 29. Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films Elena Bassiachvili; 30. Residual stress in sputtered silicon oxycarbide thin films Xin Zhang; 31. Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles Daniel Peter; 32. Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs Yoonkap Kim.