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· 제목 : From Mems to Bio-Mems and Bio-Nems: Manufacturing Techniques and Applications (Hardcover, 3) 
· 분류 : 외국도서 > 기술공학 > 기술공학 > 나노테크놀리지/MEMS
· ISBN : 9781420055160
· 쪽수 : 650쪽
· 출판일 : 2011-06-13
· 분류 : 외국도서 > 기술공학 > 기술공학 > 나노테크놀리지/MEMS
· ISBN : 9781420055160
· 쪽수 : 650쪽
· 출판일 : 2011-06-13
목차
From Traditional Manufacturing to Nanotechnology: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared. Nature as an Engineering Guide Biomimetics. Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared. Packaging, Assembly, and Self-Assembly. Selected Materials and Processes for MEMS and NEMS. Metrology and MEMS/NEMS Modeling.
Scaling Laws, Actuators, and Power and Brains in Miniature Devices: Scaling Laws. Actuators. Power and Brains in Miniature Devices.
Miniaturization Application: MEMS and NEMS Applications.
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