Advanced Interconnects for ULSI Technology 양장본 Hardcover
Baklanov, Mikhail, Ho, Paul S., Zschech, Ehrenfried | John Wiley & Sons Inc
375,620원 | 20120417 | 9780470662540
This technology is the base for all modern microelectronic components that are the enabling technology for all information technology systems and devices.
Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.
"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
This technology is the base for all modern microelectronic components that are the enabling technology for all information technology systems and devices.