책 이미지
eBook 미리보기
책 정보
· 제목 : Plasma Etching: An Introduction (Hardcover) (An Introduction)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 공업기술
· ISBN : 9780124693708
· 쪽수 : 476쪽
· 출판일 : 1989-07-28
· 분류 : 외국도서 > 기술공학 > 기술공학 > 공업기술
· ISBN : 9780124693708
· 쪽수 : 476쪽
· 출판일 : 1989-07-28
목차
D.L. Flamm and G.K. Herb, Plasma Etching Technology. An Overview. D.L. Flamm, Introduction to Plasma Chemistry. S.A. Cohen, An Introduction to Plasma Physics for Materials Processing. D.M. Manos and H.F. Dylla, Diagnostics of Plasmas for Materials Processing. A.R. Reinberg, Plasma Etch Equipment and Technology. J.M.E. Harper, Ion Beam Etching. G.K. Herb, Safety, Health, and Engineering Considerations for Plasma Processing.
