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· 제목 : Introductory MEMS: Fabrication and Applications (Hardcover) (Fabrication and Applications)
· 분류 : 외국도서 > 교육/자료 > 참고자료 > Q/A
· ISBN : 9780387095103
· 쪽수 : 440쪽
· 출판일 : 2009-12-21
· 분류 : 외국도서 > 교육/자료 > 참고자료 > Q/A
· ISBN : 9780387095103
· 쪽수 : 440쪽
· 출판일 : 2009-12-21
목차
Preface.- Part I: Fabrication.- Introduction.- The Substrate and Adding To It.- Creating Patterns-Lithography.- Creating Structures-Micromachining.- Solid Mechanics.- Part II: Applications.- Thinking About Modeling.- MEMS Transducers-An Overview of How They Work.- Piezoresistive Transducers.- Capacitive Transducers.- Piezoelectric Transducers.- Thermal Transducers.- Introduction to Microfluidics.- Microfabrication Laboratories.- Appendices.- Glossary.- Index.
