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· 제목 : Introduction to VLSI Process Engineering (Hardcover, English ed.) 
· 분류 : 외국도서 > 컴퓨터 > 로직 설계
· ISBN : 9780412395505
· 쪽수 : 210쪽
· 분류 : 외국도서 > 컴퓨터 > 로직 설계
· ISBN : 9780412395505
· 쪽수 : 210쪽
목차
Preface to the English language edition. Coming age of VLSI elements. Semiconductor market. Evolution of semiconductors. Characteristics of VLSI. VLSI process engineering operations. Packaging and process monitoring technology. Production of silicon wafers and environmental. Process engineering aspects of VLSI production. References. Appendices. Index.
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