Microwave Excited Plasmas (Hardcover)

1. Introduction (M. Moisan, J. Pelletier). 2. Physical principles of microwave plasma generation (C.M. Ferreira et al.). 3. Kinetic modelling of microwave discharges: Influence of the discharge stimulating frequency (C.M. Ferreira, M. Moisan). 4. Plasmas sustained within microwave circuits (Z. Zakrzewski et al.). 5. Surface-wave plasma sources (M. Moisan, Z. Zakrzewski). 6. Principles of magnetically assisted microwave discharges (J. Margot et al.). 7. Operation and properties of magnetically assisted high frequency discharges intended for applications (J. Margot, R.A. Gottscho). 8. Surface wave sustained plasmas in static magnetic fields for the study of ECR discharge mechanisms (J. Margot, M. Moisan). 9. Interest of plasma confinement and its limits (J. Pelletier et al.). 10. Discharges confined by multipolar magnetic fields (R. Burke, J. Pelletier). 11. Ambipolar diffusion model of multipolar plasmas (G. Matthieussent, J. Pelletier). 12. Homogeneity in multipolar discharges: The role of primary electrons (J. Pelletier, G. Matthieussent). 13. High frequency sustained multipolar plasmas (C. Pomot, J. Pelletier). 14. Distributed electron cyclotron resonance (DECR) plasmas (M. Pichot, J. Pelletier). 15. Applications of microwave plasmas in microcircuit fabrication (J. Paraszczak, J. Heidenreich). Index of symbols. Index.