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· 제목 : [eBook Code] Handbook of Infrared Spectroscopy of Ultrathin Films (eBook Code, 1st)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 재료과학
· ISBN : 9780470352366
· 쪽수 : 710쪽
· 출판일 : 2008-05-02
· 분류 : 외국도서 > 기술공학 > 기술공학 > 재료과학
· ISBN : 9780470352366
· 쪽수 : 710쪽
· 출판일 : 2008-05-02
목차
Preface.
Acronyms and Symbols.
Introduction.
1. Absorption and Reflection of Infrared Radiation by.Ultrathin Films.
2. Optimum Conditions for Recording Infrared Spectra of Ultrathin Films.
3. Interpretation of IR Spectra of Ultrathin Films.
4. Equipment and Techniques 307.
5. Infrared Spectroscopy of Thin Layers in Silicon Microelectronics.
6. Application of Infrared Spectroscopy to Analysis of Interfaces and Thin Dielectric Layers in Semiconductor Technology.
7. Ultrathin Films at Gas-Solid, Gas-Liquid, and Solid-Liquid Interfaces.
Appendix.
References.
Index.
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