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· 제목 : Micro-Manufacturing (Hardcover)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 기계설계
· ISBN : 9780470556443
· 쪽수 : 404쪽
· 출판일 : 2011-05-31
· 분류 : 외국도서 > 기술공학 > 기술공학 > 기계설계
· ISBN : 9780470556443
· 쪽수 : 404쪽
· 출판일 : 2011-05-31
목차
FOREWORD.
CONTRIBUTORS.
1 FUNDAMENTALS OF MICRO-MANUFACTURING.
2 MICRO-FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY.
3 MODELING AND ANALYSIS AT MICRO-SCALES.
4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO-SCALES.
5 MICRO-LAYERED MANUFACTURING.
6 MICRO-LASER PROCESSING.
7 POLYMER MICRO-MOLDING/FORMING PROCESSES.
8 MECHANICAL MICRO-MACHINING.
9 MICRO-FORMING.
10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM).
11 METAL INJECTION MOLDING AT MICRO-SCALES (μMIM).
INDEX.
