Introduction to Surface and Thin Film Processes (Paperback)

Preface; 1. Introduction to surface processes; 2. Surfaces in vacuum: ultra-high vacuum techniques and processes; 3. Electron-based techniques for examining surface and thin film processes; 4. Surface processes in adsorption; 5. Surface processes in epitaxial growth; 6. Electronic structure and emission processes at metallic surfaces; 7. Semiconductor surfaces and interfaces; 8. Surface processes in thin film devices; 9. Postscript: where do we go from here?; Appendices; References.