Electrical Characterization of Silicon-On-Insulator Materials and Devices (Hardcover, 1995)

1. Introduction. 2. Methods of Forming SOI Wafers. 3. SOI Devices. 4. Wafer Screening Techniques. 5. Transport Measurements. 6. SUS Capacitor Based Characterization Techniques. 7. Diode Measurements. 8. Transistor Characteristics. 9. Transistor Based Characterization Techniques. 10. Monitoring the Transistor Degradation. Index.