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· 제목 : Semiconductor Industrial Hygiene Handbook: Monitoring, Ventiliation, Equipment and Ergonomics (Hardcover) (Monitoring, Ventilation, Equipment, and Ergonomics)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780815513698
· 쪽수 : 363쪽
· 출판일 : 1995-12-31
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780815513698
· 쪽수 : 363쪽
· 출판일 : 1995-12-31
목차
Introduction
Industrial Hygiene Monitoring
Industrial Hygiene Monitoring: Physical Agents
Ventilation
Personal Protective Equipment (PPE)
Indoor Air Quality (IAQ)
Ergonomics
Industrial Hygiene Recordkeeping
Plan Review
Appendix A: Silicon Ingot and Wafer Manufacturing
Appendix B: Silicon Device Manufacturing Introduction
Appendix C: III-V (GaAs)
Appendix D: III-V Device: Microwave IC
Appendix E: Ion Implanter Maintenance Safety Considerations
Appendix F: Bibliography
Glossary and Acronyms
Index
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