Handbook of Physical Vapor Deposition (Pvd) Processing (Hardcover)

Introduction
Substrate (""Real"") Surfaces and Surface Modification
The Low-Pressure Gas and Vacuum Processing Environment
The Low-Pressure Plasma Processing Environment
Vacuum Evaporation and Vacuum Deposition
Physical Sputtering and Sputter Deposition (Sputtering)
Arc Vapor Deposition
Ion Plating and Ion Beam Assisted Deposition
Atomistic Film Growth and Some Growth-Related Film Properties
Film Characterization and Some Basic Film Properties
Addhesion and Deadhesion
Cleaning
External Processing Environment
APPENDIX 1: Reference Material
APPENDIX 2: Transfer of Technology from R&D to Manufacturing
Glossary of Terms and Acronyms Used in Surface Engineering