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· 제목 : Processing of 'Wide Band Gap Semiconductors (Hardcover) 
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780815514398
· 쪽수 : 591쪽
· 출판일 : 2000-12-31
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780815514398
· 쪽수 : 591쪽
· 출판일 : 2000-12-31
목차
Doping Limits and Bandgap Engineering in Wide Gap IIVI Compounds
Epitaxial Growth of II-VI Compounds by MOVPE
Ohmic Contacts to II-VI and III-V Compound Semiconductors
Dry Etching of SiC
Processing of Silicon Carbide for Devices and Circuits
Plasma Etching of III-V Nitrides
Ion Implantation in Wide Bandgap Semiconductors
Rare Earth Impurities in Wide Gap Semiconductors
SIMS Analysis of Wide Bandgap Semiconductors
Hydrogen in Wide Bandgap Semiconductors
Diamond Deposition and Characterization
Index
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