Mems: A Practical Guide to Design, Analysis and Applications (Hardcover)

Introduction
Microtransducer Operation
Material Properties: Measurement and Data
MEMS and MEMS Simulation
System-Level Simulation of Microsystems
Thermal Based Sensors
Photon Detectors
Free-Space Optical MEMS
Integrated Micro-Optics
Magnetic Microsensors
Mechanical Microsensors
Semiconductor-Based Chemical Microsensors
Microfluidics
Biomedical Microsystems
Microactuators
Micromachining Technology
Interface Circuitry and Microsystems
Index