책 이미지
eBook 미리보기
책 정보
· 제목 : Mems: A Practical Guide to Design, Analysis and Applications (Hardcover)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전기공학
· ISBN : 9780815514978
· 쪽수 : 990쪽
· 출판일 : 2006-12-31
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전기공학
· ISBN : 9780815514978
· 쪽수 : 990쪽
· 출판일 : 2006-12-31
목차
Introduction
Microtransducer Operation
Material Properties: Measurement and Data
MEMS and MEMS Simulation
System-Level Simulation of Microsystems
Thermal Based Sensors
Photon Detectors
Free-Space Optical MEMS
Integrated Micro-Optics
Magnetic Microsensors
Mechanical Microsensors
Semiconductor-Based Chemical Microsensors
Microfluidics
Biomedical Microsystems
Microactuators
Micromachining Technology
Interface Circuitry and Microsystems
Index
