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· 분류 : 외국도서 > 기술공학 > 기술공학 > 재료과학
· ISBN : 9780815515357
· 쪽수 : 495쪽
· 출판일 : 2006-11-15
목차
Vacuum Basics
Products using vacuum deposited coatings
Pressure Measurement
Pumping
Process Diagnostics & Coating Characteristics
Leaks, water vapour and leak testing
Mass spectrometers, Helium leak detectors & residual gas analysers
Substrates, surface modification and nucleation
Substrates - surface quality, cleaning - adhesion & adhesion testing
Surface treatment of webs & foils
Nucleation, coalescence & film growth.
Process
The D.C. Glow Discharge or Plasma
Electron beam (e-beam) evaporation
Thermal evaporation
Radiant heated and Induction heated sources
Chemical Vapour Deposition / Polymerisation onto webs.
Planar Magnetron Sputtering source design and operation.
Planar magnetron design options.
Reactive deposition u set-up & control
System issues
Machine specification & build issues
Heat load on the webs/foils
Process variables
Mechanical design
Winding webs in vacuum
Metallizer machine building trends
System design
Hazards
Troubleshooting