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· 제목 : Sputtering Materials for VLSI and Thin Film Devices (Hardcover) 
· 분류 : 외국도서 > 기술공학 > 기술공학 > 공학일반
· ISBN : 9780815515937
· 쪽수 : 608쪽
· 분류 : 외국도서 > 기술공학 > 기술공학 > 공학일반
· ISBN : 9780815515937
· 쪽수 : 608쪽
목차
Chapter 1:? Sputtering materials for microelectronic industry
Chapter 2:? Sputter deposition of thin films
Chapter 3:? Performance of sputtering targets and productivity
Chapter 4:? Sputtering target manufacturing
Chapter 5:? Sputtering targets for integrated circuits
Chapter 6:? Sputtering targets for displays and photovoltaic devices
Chapter 7:? Ferromagnetic sputtering targets for silicide and data storage applications
Chapter 8:? Troubleshooting
Appendix I Diffusion and phase transformation
Appendix II Crystallographic texture
Appendix III Phase change materials
Appendix IV Mechanical property evaluation
Appendix V Units and conversion factors
Appendix VI Periodic table
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