Microengineering, MEMS, and Interfacing: A Practical Guide (Hardcover)

MICROMACHINING. IntroductionPhotolithography. Introduction. UV Photolithography. X-Ray Lithography. Direct-Write (E-Beam) Lithography. Low-Cost Photolithography. Photolithography-Key Points. ReferencesSilicon Micromachining. Introduction. Silicon. Crystal Growth. Doping. Wafer Specifications. Thin Films. Structures in Silicon. Wafer Dicing. ReferencesNonsilicon Processes. Introduction. Chemical-Mechanical Polishing. LIGA and Electroplating. Photochemical Machining. Laser Machining. Polymer Microforming. Electrical Discharge Machining. Photostructurable Glasses. Precision Engineering. Other Processes. ReferencesMask Design. Introduction. Minimum Feature Size. Layout Software. Design. Design Rules. Getting the Masks Produced. Generating Gerber Files. Mask Design-Key PointsMICROSYSTEMS. IntroductionMicrosensors. Introduction. Thermal Sensors. Radiation Sensors. Magnetic Sensors. Chemical Sensors and Biosensors. Microelectrodes for Neurophysiology. Mechanical SensorsMicroactuators. Introduction. Electrostatic Actuators. Magnetic Actuators. Piezoelectric Actuators. Thermal Actuators. Hydraulic Actuators. Multilayer Bonded Devices. MicrostimulatorsMicro Total Analysis Systems. Introduction. Basic Chemistry. Applications of Microengineered Devices in Chemistry and Biochemistry. Micro Total Analysis Systems. DNA Chips. The Polymerase Chain Reaction (PCR). Conducting Polymers and Hydrogels. ReferencesIntegrated Optics. Introduction. Waveguides. Integrated Optics Components. Fiber Coupling. Other ApplicationsAssembly and Packaging. Introduction. Assembly. Passivation. Prepackage Testing. Packaging. Wire Bonding. Materials for Prototype Assembly and PackagingNanotechnology. Introduction. The Scanning Electron Microscope. Scanning Probe Microscopy. Nanoelectromechanical Systems. Langmuir-Blodgett Films. Bionanotechnology. Molecular Nanotechnology. ReferencesINTERFACING. IntroductionAmplifiers and Filtering. Introduction. Op-Amp. Instrumentation Amplifiers. Wheatstone Bridge. Filtering. ReferencesComputer Interfacing. Introduction. Driving Analog Devices from Digital Sources. Analog-to-Digital Conversion. Analog-to-Digital Converters. Converter Summary. ReferencesOutput Drivers. Introduction. Controlling Currents and Voltages with Op-Amps. Transistors. Relays. BJT Output Boost for Op-Amps. OptoisolatorsIndex