Micro Electro Mechanical System Design (Hardcover)

Table of
INTRODUCTION
Historical Perspective
The Development of MEMS Technology
MEMS: Present and Future
MEMS Challenges
The Aim of This Book
Questions
References

FABRICATION PROCESSES
Materials
Starting Material - Substrates
Physical Vapor Deposition (PVD)
Chemical Vapor Deposition (CVD)
Etching Processes
Patterning
Wafer Bonding
Annealing
Chemical Mechanical Polishing (CMP)
Material Doping
Summary
Questions
References

MEMS TECHNOLOGIES
Bulk Micromachining
LIGA
Sacrificial Surface Micromachining
Integration of Electronics and MEMS Technology (IMEMS)
Technology Characterization
Alternative MEMS Materials
Summary
Questions
References

SCALING ISSUES FOR MEMS
Scaling of Physical Systems
Computational Issues of Scale
Fabrication Issues of Scale
Material Issues
Newly Relevant Physical Phenomena
Summary
Questions
References

DESIGN REALIZATION TOOLS FOR MEMS
Layout
SUMMiT™ Technology Layout
Design Rules
Standard Components
MEMS Visualization
MEMS Analysis
Summary
Questions
References

ELECTROMECHANICS
Structural Mechanics
Damping
Electrical System Dynamics
Questions
References

MODELING AND DESIGN
Design Synthesis Modeling
Lagrange's Equations
Numerical Modeling
Design Uncertainty
Problems
References

MEMS SENSORS AND ACTUATORS
MEMS Actuators
MEMS Sensing
Questions
References

PACKAGING
Packaging Process Steps
Packaging Case Studies
Summary
Questions
References

RELIABILITY
Reliability Theory and Terminology
Essential Aspects of Probability and Statistics for Reliability
Reliability Models
MEMS Failure Mechanisms
Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing
MEMS Reliability and Design
MEMS Reliability Case Studies
Summary
Questions
References

APPENDIX
Glossary
Prefixes
Micro-MKS Conversions
Physical Constants
Material Properties
Stiffness Coefficients of Frequently Used MEMS Flexures
Common MEMS Cross-Section Properties
Design Synthesis Software and Files