Run-To-Run Control in Semiconductor Manufacturing (Hardcover)

IntroductionWhat is Run-top-Run Control?Target AudiencePurpose of this BookOutlineBackgroundCurrent State-of-the-Art in Semiconductor Manufacturing Process ControlHistory of the Development of Run-to-Run ControlCurrent State o-of-the-Art in Run-to-Run Control Development and DeploymentSimple Example: Run-to-Run Control and Comparison to Statistical Process ControlIdentifying Target Applications for Run-to-Run ControlClass of Applications that can Utilize Run-t0-Run ControlGeneral Run-to-Run Control Development and Deployment ProcessIssues in Deploying Run-to-Run ControlDeveloping a Run-to-Run Solution: Run-to-Run AlgorithmsIntroductionLinear Approximation AlgorithmsHigher Order Approximation AlgorithmsNeural Network AlgorithmsOther ApproachesDeveloping a Run-to-Run Solution: Practical Extensions to AlgorithmsDeveloping and Deploying Run-to-Run Solutions: Integrating ControlIntroductionThe Generic Cell ControllerOther ApproachesIntegrating into Factory-Wide Manufacturing SystemRun-to-Run Solution Development, Deployment, and Customization MethodologyIntroductionProcess IdentificationChoosing a Run-to-Run Control SolutionCustomizing the Run-to-Run Control Solution to the ProcessIssuesRun-to-Run Control System Deployment Case StudiesChemical-Mechanical PlanarizationVapor Phase EpitaxyAdvanced TopicsFeasibility Analysis of Run-to-Run Control SolutionsStability Analysis of Run-to-Run Control SolutionsCombining Process Run-to-Run Control with Inter-Process ControlConclusionsSummary of Run-to-Run Development and Deployment ProcessDeploying Run-to-Run Control in a Timely and Cost Effective MannerOvercoming Barriers to DeploymentFuture Research and Development IssuesReferences