The Mems Handbook - 3 Volume Set (Hardcover, 2)

Volume 1
MEMS: Introduction and Fundamentals
Introduction; Mohamed Gad-el-Hak
Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud
Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.
Flow Physics; Mohamed Gad-el-Hak
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram
Molecular-Based Microfluidic Simulation Models; Ali Beskok
Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou
Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun
Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal
Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho
Lubrication in MEMS; Kenneth Breuer
Physics of Thin Liquid Films; Alexander Oron
Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang
Fundamentals of Control Theory; J. William Goodwine
Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley
Soft Computing in Control; Mihir Sen and Bill Goodwine
Index
Volume 2
MEMS: Design and Fabrication
Introduction; Mohamed Gad-el-Hak
Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon
MEMS Fabrication; Guangyao Jia and Marc J. Madou
LIGA and Micromolding; Guangyao Jia and Marc J. Madou
X-Ray Based Fabrication; Todd Christenson
EFAB^® Technology and Applications; Adam L. Cohen and Chris A. Bang
Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans
Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies
Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley
Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel
Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei
Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider
Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei
Index
Volume 3
MEMS: Applications
Introduction; Mohamed Gad-el-Hak
Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li
Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park
Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer
Microactuators; Alberto Borboni
Sensors and Actuators for Turbulent Flows; Lennart Lofdahl and Mohamed Gad-el-Hak
Microrobotics; Thorbjorn Ebefors and Goran Stemme
Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo
Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang
Microdroplet Generators; Fan-Gang Tseng
Micro Heat Pipes and Micro Heat Spreaders; G.P. “Bud” Peterson and Choondal B. Sobhan
Microchannel Heat Sinks; Yitshak Zohar
Flow Control; Mohamed Gad-el-Hak
Reactive Control for Skin-Friction Reduction; Haecheon Choi
Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index