Machine Learning-Based Modelling in Atomic Layer Deposition Processes (Paperback, 1)

Part 1: Introduction to Atomic Layer Deposition. 1. Overview of Atomic Layer Deposition and Thin Film Technology. 2. State of the Art Modeling and Simulation Approaches in ALD. 3. Characterization Methods in ALD. 4. Industry 4.0, Manufacturing Sector and Thin Film Technology.  Part 2: Machine Learning Techniques. 5. Fundamentals of Machine Learning. 6. Supervised Learning. 7. Unsupervised Learning.  8. Deep Learning. 9. Hard and Soft Computing. Part 3: Machine Learning Applications in Atomic Layer Deposition. 10. Why Machine Learning? 11. Machine-Learning Based Predictive Analysis in ALD. 12. Machine Learning-Based Classification Techniques in ALD. 13. Deep Learning in Atomic Layer Deposition. 14. Feature Engineering in Atomic Layer Deposition. 15. Limitations, Opportunities, and Future Directions.