VACUUM TECHNIQUE (Paperback)

INTRODUCTIONThe Concept of VacuumHistory of Vacuum EngineeringApplications of Vacuum instrumentsPROPERTIES OF GASES AT LOW PRESSURESGas PressureVelocity Distribution of Gas MoleculesMean Free Path LengthInteraction of Gas Molecules With SurfacesAdsorption TimeSaturation PressureSurface Coverage With Gas MoleculesGas Dissolution in SolidsElectrical PhenomenaTest QuestionsTHEORYDegrees of VacuumTransport PhenomenaThermal Equilibrium of PressuresCalculation of Gas Flow by the Method of Continuum mechanicsCalculation of Gas Flow Using the Method of Integral Angular CoefficientsModeling of Gas FlowGas EvolutionBasic EquationTest QuestionsMEASUREMENT OF VACUUMClassification of Measurement MethodsMechanical MethodsThermal MethodsElectrical Methods of Total Pressure MeasurementElectrical Methods of Measuring Partial PressureSorption MethodsCalibration of TransducersMeasurement of Gas FlowsLeak Detection MethodsTest QuestionsMECHANICAL METHODS OF VACUUM PRODUCTIONGeneral Characteristic of Vacuum PumpsVolume PumpingDesign of Displacement PumpsMolecular PumpingDesign of Molecular PumpsVapor Jet PumpingWorking LiquidsDesign of Vapor Jet PumpsTrapsTest QuestionsPHYSICO-CHEMICAL METHODS OF VACUUM PRODUCTIONGeneralIon PumpingChemisorption PumpingEvaporation PumpsCryocondensation PumpingCryoadsorption PumpingCryogenic PumpsGetter-Ion PumpingGetter-Ion PumpsTest QuestionsANALYSIS OF THE VACUUM SYSTEMSTypical Vacuum SystemsCalculation of Gas LoadEquations of Steady-State PumpingConnections of System Elements and Pumped ObjectsConnection of PumpsTime of PumpingCost of PumpingVerifying Calculation of a Vacuum SystemAn Example of Verifying CalculationTest QuestionsDESIGN OF VACUUM SYSTEMSDatabase of Vacuum System ElementsStructural Design of Vacuum Systems Using the Method of Selecting VariantsStructural Design Using Typical PatternParametric Design of a Vacuum System Using the Utilization Coefficient of Vacuum PumpMultiparametric Design of a Vacuum SystemSchematic Connections and AssemblyProjecting Calculation of a Vacuum SystemExample of Projecting Calculation of a Vacuum System in Steady-State ModeTest QuestionsCONSTRUCTION OF VACUUM SYSTEMSMaterials of Vacuum EngineeringNon-Detachable ConnectionsDetachable Vacuum ConnectionsVacuum PipelinesDevices for Transmitting Movement to VacuumElectrical Vacuum ContactsVacuum ValvesTest QuestionsPROBLEMSProperties of Gases at Low TemperaturesTheory of Vacuum EngineeringCalculation of Vacuum SystemsREFERENCE TABLESAPPENDIXDerivation of the Maxwell-Boltzmann FunctionAverage VelocityThe Equation of Polymolecular AdsorptionThe Equation of Gas Flow Through an Aperture in Viscous Flow ModeREFERENCESINDEX