FinFET Devices for VLSI Circuits and Systems (Hardcover, 1)

1.Introduction1.1Fin Field-Effect Transistors1.2Overview of MOSFET Devices for Integrated Circuit Manufacturing1.3Alternative Device Concepts1.4FinFET Devices for VLSI Circuits and Systems1.5A Brief History of FinFET Devices1.6SummaryReferences 2.Fundamentals of Semiconductor Physics2.1Introduction2.2Semiconductor Physics 2.3Theory of n-type and p-Type Semiconductors in Contact2.4SummaryReferences 3.Multiple Gate Metal-Oxide-Semiconductor (MOS) System3.1Introduction3.2Multigate MOS Capacitors at Equilibrium3.3MOS Capacitor under Applied Bias3.4Multigate MOS Capacitor Systems: Mathematical Analysis3.5Quantum Mechanical Effect3.6SummaryReferences 4.Overview of FinFET Device Technology4.1Introduction4.2FinFET Manufacturing Technology4.3Bulk-FinFET Fabrication4.4SOI FinFET Process Flow4.5SummaryReferences 5.Long Channel FinFETs5.1Introduction5.2Basic Features of FinFET Devices5.3FinFET Device Operation5.4Drain Current Formulation5.5SummaryReferences 6.Small Geometry FinFETs: Physical Effects on Device Performance6.1Introduction6.2Short-channel Effects on Threshold Voltage6.3Quantum Mechanical Effects6.4Surface Mobility6.5High Field Effects6.6Output Resistance6.7SummaryReferences 7.Leakage Currents in FinFETs7.1Introduction7.2Subthreshold Leakage Currents7.3Gate-Induced Drain and Source Leakage Currents7.4Impact Ionization Current7.5Source-Drain pn-Junction Leakage Current7.6Gate Oxide Tunneling Currents7.7SummaryReferences 8.Parasitic Elements in FinFETs8.1Introduction8.2Source-Drain Parasitic Resistance8.3Gate Resistance8.4Parasitic Capacitance Elements8.5Source-Drain pn-Junction Capacitance8.6SummaryReferences 9.Challenges of FinFET Process and Device Technology9.1Introduction9.2Process Technology Challenges9.3Device Technology Challenges9.4Challenges in FinFET Circuit Design9.5SummaryReferences 10.FinFET Compact Modeling for Circuit Simulation10.1Introduction10.2Compact Device Model10.3Common Multiple-Gate Compact FinFET Model10.4Dynamic Model10.5Process Variability Modeling10.6SummaryReferences