Micro- and Nano-Scale Sensors and Transducers (Paperback)

Pressure SensorsCapacitive Pressure Sensors Structure Theory Experimental resultsInductive Pressure Sensors Structure Theory Experimental results Sensor interface circuitUltrahigh-Sensitivity Pressure Sensors Structure Theory Experimental Results ConclusionQuizReferencesMotion and Acceleration SensorsUltrahigh-Sensitivity,Wide Dynamic Range Sensors Structure Theory Experimental Results ConclusionOther Motion and Acceleration Micro SensorsQuizReferencesGas and Smoke SensorsA CO Gas Sensor based on Nanotechnology Structure Theory Assembly of the Sensor Experimental Results Auxiliary Experimental Results ConclusionSmoke Detectors Structure Qualitative Description of the Detector Theory Experimental Results ConclusionQuizReferencesMoisture SensorsStructureTheoryMain Experimental ResultsAuxiliary Experimental ResultsConclusionQuizReferencesOptoelectronic and Photonic SensorsOptoelectronic Microphone Introduction and Principle of Operation Theory Description of the Image Acquisition / Pattern Recognition Hardware and Software Experimental Results ConclusionOther Optoelectronic and Photonic Micro SensorsQuizReferencesBiological, Chemical, and "Lab on a Chip" Sensors"Lab on a Chip" SensorsOther Bio-Chemical Micro and Nano Sensors QuizReferencesElectric, Magnetic, and RF / Microwave SensorsMagnetic Field Sensors Introduction and Principle of Operation Theory Manufacturing and Assembly of the Prototype Sensor Numerical Data and Experimental Results Conclusion Other Important Electromagnetic / RF Micro and Nano SensorsQuizReferencesIntegrated Sensor / Actuator Units and Special Purpose SensorsAircraft Icing Detectors Introduction and Principle of Operation Theory Performance Data and Experimental Results ConclusionMicrofluidic, Micro-Actuators, and Other Special Purpose Small-Scale DevicesQuiz References