Thin Film Transistors: Materials and Processes (Boxed Set, 2003)

1 Introduction.- 1. Brief History of Thin Film Transistors.- 2. a-Si:H TFT LCDs.- 3. Unique a-Si:H TFT Issues.- 4. Chapter Flow in the Book.- References.- 2 a-Si:H TFT Thin Film and Substrate Materials.- 1. Introduction.- 2. Semiconductors.- 3. Dielectrics.- 4. Substrates.- 5. Characterization Techniques.- 6. Summary.- References.- List of Symbols.- 3 Device Physics, Compact Modeling, and Circuit Applications of a-Si:H TFTs.- 1. Introduction.- 2. Density of States and Electronic Transport.- 3. Device Physics and Compact Modeling.- 4. Threshold Voltage Metastibility.- 5. Parameter Extraction.- 6. Circuit Applications.- 7. Summary.- References.- List of Symbols.- 4 a-Si:H TFT Structures.- 1. Introduction.- 2. Basic Structures.- 3. Simplified Structures and Processes.- 4. Unique Structures and Processes.- 5. Redundant Structures.- 6. Summary.- References.- List of Symbols.- 5 Deposition of Intrinsic and Doped Semiconductor Thin Films for a-Si:H TFT.- 1. Introduction.- 2. Semiconductor Layer Deposition.- 3. Doped Amorphous and Microcrystalline Silicon.- 4. Summary.- References.- List of Symbols.- 6 Deposition of Dielectric Thin Films for a-Si:H TFT.- 1. Introduction.- 2. Selection of Dielectric Materials and Deposition Methods.- 3. PECVD SiNx Dielectric Layer.- 4. Yield Issues Related to Dielectrics.- 5. Summary.- References.- List of Symbols.- 7 Plasma Etching in a-Si:H TFT Array Fabrication.- 1. Introduction.- 2. Topics in Plama Etching of a-Si:H TFTs.- 3. Summary.- References.- 8 Metallization in a-Si:H TFT Array Fabrication.- 1. Introduction.- 2. Basic Understanding of Conductor Lines in TFT LCDs.- 3. Conductor Requirements for a-Si:H TFTs.- 4. Conducting Materials for TFT Array.- 5. Key Issues in Conducting Materials for Advanced TFT Array Fabrication.- 6. Conductor Deposition for TFT Arrays.- 7. Wet Etching of Conductors for a-Si:H TFT Arrays.- 8. Summary.- References.- List of Symbols.- 9 Catalytic Chemical Vapor Deposition of a-Si:H TFT.- 1. Introduction: Cat-CVD vs. PECVD.- 2. History of Cat-CVD.- 3. Fundamentals of Cat-CVD Technology.- 4. Performance of Cat-CVD a-Si:H TFT.- 5. Summary.- References.- List of Symbols.- 10 a-Si:H TFT-Based Active Matrix Flat-Panel Imagers for Medical X-ray Applications.- 1. Introduction and Background.- 2. Basic Design and Operation of AMFPIs.- 3. Detailed Functioning and Properties of AMFPIs.- 4. Summary and Outlook.- References.- List of Symbols.- 11 Non-LCD Applications of a-Si:H TFTs.- 1. Introduction.- 2. Medical Imagers.- 3. Flat Panel Displays.- 4. Contact Imagers, Scanners, and Printers.- 5. Photo-Transistors.- 6. Chemical Sensors.- 7. Circuits on Various Substrates.- 8. Summary.- References.- 1 Introduction.- 1. The Increase in Poly-Si TFT Activities.- 2. Scientific and Technology Issues on Poly-Si TFTs.- 3. Chapter Flow in the Book.- 2 Poly-Si Thin Film and Substrate Materials.- 1. Introduction.- 2. Poly-Si Basic Material Properties for TFT Applications.- 3. Dielectric Material Properties for Poly-Si TFT Applications.- 4. Substrates.- 5. Summary.- References.- List of Symbols.- 3 Physics and Modeling of Poly-, Micro-, and Nano-Si TFTs.- 1. Introduction.- 2. Physics of Poly-Si TFTs.- 3. Poly-Si TFT Device Models.- 4. Micro- and Nano-Crystalline Silicon TFTs.- 5. Circuit Simulation Examples.- 6. Summary.- References.- List of Symbols.- 4 Poly-Si TFT Structures.- 1. Introduction.- 2. Basic TFT Structures.- 3. Drain Engineering.- 4. Novel TFT Structures.- 5. Summary.- References.- List of Symbols.- 5 Poly-Si TFTs by Laser Crystallization Methods.- 1. Introduction.- 2. History.- 3. Pulsed Laser Heating and Rapid Crystallization.- 4. Structural and Electrical Properties.- 5. Poly-Si TFT Fabrication and its Characteristics.- 6. Large Crystalline Grain.- 7. CW Laser Crystallization.- 8. Summary.- References.- List of Symbols.- 6 Poly-Si TFTs by Non-Laser Crystallization Methods.- 1. Introduction.- 2. Solid Phase Crystallization (SPC) by Thermal Methods.- 3. Metal Induced Crystallizati