Semiconductor Industry: Wafer Fab Exhaust Management (Hardcover)

SEMICONDUCTOR AND WAFER MANUFACTURING FACILITIES
Wafer Fab Layout
Facility-Support Operations
Semiconductor Process Equipment

EXHAUST TYPES AND CHALLENGES
Exhaust Types
Exhaust Management Challenges

POINT-OF-USE DEVICES AND EXHAUST-LINE REQUIREMENTS
Point-Of-Use Device Information
Surrounding Exhaust-Line Requirements
Examples of Point-Of-Use Devices for Selected Processes
Fab Examples of Point-Of-Use Devices
Developing a Point-Of-Use Device and Surrounding Exhaust-Line Strategy
"Development Opportunities" for Point-Of-Use Devices

CENTRALIZED SCRUBBERS
Introduction
General Design and Operation
General Operation Information
Acid Scrubbers for Large Storage Tanks of Concentrated Acid Solution
Centralized Abatement Systems for Higher Inlet Concentrations of Acid Compounds, Chlorine, and Acid Mists
Centralized Scrubbing System for Oxides of Nitrogen
Specifying a Centralized Wet Scrubber

CENTRALIZED EQUIPMENT TO CONTROL VOLATILE ORGANIC COMPOUNDS
Introduction
Centralized Equipment Technologies to Control Volatile Organic Compounds
Examples of Selection Criteria for Centralized Equipment to Control Volatile Organic Compounds
Location of Fans
Testing of Centralized Equipment to Control Volatile Organic Compounds
Specification to Supplier of Centralized Equipment to Control Volatile Organic Compounds

EMERGENCY RELEASES
Introduction
Controlling Releases from Gas Cylinders or Other Vessels
Silane Emergency Release
Reduction of Emergency Release of Concentrations of Stack Discharge

EXHAUST MANAGEMENT AND AIR ABATEMENT EQUIPMENT EXAMPLES
List of Examples
Example No. 7-1
Example No. 7-2
Example No. 7-3
Example No. 7-4
Example No. 7-5

List of Acronyms