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· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 일반
· ISBN : 9781848214361
· 쪽수 : 384쪽
· 출판일 : 2013-02-15
목차
Preface ix
Chapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1
François MARTIN, Jean-Michel HARTMANN, Véronique CARRON and Yannick LE TIEC
1.1. Introduction 1
1.2. Arrangement of the gate 3
1.3. Chemistry of crystalline materials 19
1.4. Contact areas between the gate and the "source" and "drain" 38
1.5. General conclusion 57
1.6. List of Abbreviations 58
1.7. Bibliography 59
Chapter 2. Chemistry in Interconnects 81
Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAÎTREJEAN and Didier LOUIS
2.1. Introduction 81
2.2. Interconnects: generalities and background 83
2.3. Dielectric deposits 99
2.4. Deposition and properties of metal layers for interconnect structures 122
2.5. Cleaning process for copper interconnects 144
2.6. General conclusions and perspectives 161
2.7. List of Abbreviations 164
2.8. Bibliography 165
Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187
Yannick LE TIEC and Martin KNOTTER
3.1. Introduction 187
3.2. Cleaning 188
3.3. Wet etching 202
3.4. Rinsing and drying 214
3.5. Conclusion 224
3.6. List of Abbreviations 225
3.7. Bibliography 225
Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233
Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI
4.1. Ultrapure water 233
4.2. Gases for semiconductors 251
4.3. Dissolved gases 268
4.4. High-purity chemicals 283
4.5. Waste management 290
4.6. List of Abbreviations 301
4.7. Bibliography 303
Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309
Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET
5.1. Introduction 309
5.2. Materials 310
5.3. Functionalization process 317
5.4. Molecule and macromolecule immobilization 332
5.5. Analytes capture 340
5.6. Conclusion 348
5.7. List of Abbreviations 349
5.8. Bibliography 349
List of Authors 361
Index 363
