Mechanics and Physics of Precise Vacuum Mechanisms (Hardcover)

Contents; Preface; About the Authors; 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment;References; 2 Typical Vacuum Mechanisms; 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs; 2.3 Linear-Motion Feedthrough; 2.4 Manipulators; 2.5 Micro Mechanisms; References; 3 Friction in Vacuum; 3.1 Friction Coefficients of Different Materials in Atmosphere and in Vacuum; 3.2 Dry Friction Laws in Atmosphere and in Vacuum;3.3 The Main Factors, which Determine the Surface Coverage at "Dry" Friction; 3.3.1 Influence of the Residual Pressure and Temperature; 3.3.2 Influence of the Sliding Velocity and Roughness Geometry; 3.4 The Theoretical Analysis of Friction in the Different Ranges of Coverage; 3.4.1 Viscous Component of a Friction Force; 3.4.2 Capillary Component of a Friction Force; 3.4.3 Adhesive-Viscous Friction; 3.4.4 Adhesive Friction; 3.4.5 Cohesion Friction; 3.5 The Possibility to Use the Described Method for the Calculation of the Friction Coefficient of Real Surfaces; 3.6 Exchange of Gases at Friction in Vacuum References; 4 Matrix Method of the Design of New Mechanisms Structure; 4.1 The Stages of the Matrix Method of the Mechanisms Generation; 4.2 The List of the Parameters of Vacuum Mechanisms Which Are Used in Matrix Analysis; 4.2.1 The First (Highest) Level Parameters; 4.2.2 The Second Level Parameters; 4.2.3 The Third Level Parameters; 4.2.4 The Fourth Level Parameters; 4.3 Algorithm of the Matrix Method of the Generation of New Mechanisms; References; 5 Precision of Vacuum Mechanisms; 5.1 The Constituents of Errors of Vacuum Mechanisms; 5.2 The Basic Positions of the Precision Theory of Vacuum Mechanisms; 5.2.1 Open-Loop-Controlled Drive; 5.2.2 Completely Loop-Controlled Drive; 5.3 Determination of the Error Components of Different Origins; 5.3.1 Calculation of the Kinematic Component of the Error; 5.3.2 Calculation of the Error from Elastic Deformations; 5.3.3 Calculation of the Error Caused by the Deformation of theThin-Wall Sealing Elements; 5.3.4 Calculation of the Positioning Error Caused by the Resistance Forces at Movement; 5.4 Summarizing the Components of different Types and Forms; 5.5 Correlation of Total Error of the Mechanisms with Economic Parameters; References; 6 Vacuum Mechanisms of Nanoscale Precision; 6.1 The Principles of Nanometer Precision of Vacuum Mechanisms; 6.2 Physical Effects Which Are Used for Vacuum Mechanisms of Nanometer Precision Creation; 6.2.1 Piezo Effect; 6.2.2 Magnetic and Electric Rheology Effects; 6.3 Vacuum Drives and Manipulators of Nanoscale Precision; 6.3.1 Vacuum Piezo Drives; 6.3.2 Multi-Coordinate Magnetic and Rheology Drives and Manipulators; References ; 7 Ultrahigh Vacuum Rotary-Motion Feedthroughs; 7.1 Analysis of Design Variants of Thin-Wall Sealing Elements on Parameter "Manufacturability"; 7.2 Precision of Harmonic Gear Rotary Feedthroughs; 7.3 Longevity of Harmonic Gear Rotary Feedthrough; 7.4 Outgassing Flow of Harmonic Rotary-Motion Feedthrough; 7.5 Calculation of Hermetic Harmonic Gear Feedthrough; 7.5.1 Determinationof the Number of Teeth; 7.5.2 Calculation of Main Sizes of Flexible Gears; 7.5.3 Calculation of Control Rollers Size of Rigid Gear; 7.5.4 Calculation of Flexible Gear Geometry, Calculation of Geometry Sizes which Ensure Hermetic Properties of Flexible Gear; 7.5.5 Calculation of Assurance Factor of Flexible Gear Teeth; 7.5.6 Calculation of Flexible Gear Wave Generator; References; 8 Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs; 8.1 The Hermetic Drive Designs Principles Based on Non-Coaxial Nut-Screw Couples; 8.2 Geometry of Nut-Screw Coupling of Linear-Motion Hermetic Feedthrough; 8.3 Kinematic Calculation; 8.4 Force Calculation of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms; 8.5 System Losses and Efficiency Factor of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms; 8.6 Analysis of Loading Ability of Planetary Nut-Screw Feedthroughs; References; 9 Vacuum