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· 제목 : Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition) (반도체 공정개론)
· 분류 : 외국도서 > 대학교재 > 공학계열
· ISBN : 9789813136236
· 쪽수 : 336쪽
· 출판일 : 2019-08-28
· 분류 : 외국도서 > 대학교재 > 공학계열
· ISBN : 9789813136236
· 쪽수 : 336쪽
· 출판일 : 2019-08-28
목차
Chapter 1 An Overview of Microelectronic Fabrication
Chapter 2 Lithography
Chapter 3 Thermal Oxidation of Silicon
Chapter 4 Diffusion
Chapter 5 Ion Implantation
Chapter 6 Film Deposition
Chapter 7 Interconnections and Contacts
Chapter 8 Packaging and Yield
Chapter 9 MOS Process Integration
Chapter 10 Bipolar Process Integration
Chapter 11 Processes for MicroElectroMechanical Systems: MEMS
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