Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition)

Chapter 1 An Overview of Microelectronic Fabrication
Chapter 2 Lithography
Chapter 3 Thermal Oxidation of Silicon
Chapter 4 Diffusion
Chapter 5 Ion Implantation
Chapter 6 Film Deposition
Chapter 7 Interconnections and Contacts
Chapter 8 Packaging and Yield
Chapter 9 MOS Process Integration
Chapter 10 Bipolar Process Integration
Chapter 11 Processes for MicroElectroMechanical Systems: MEMS
ANSWERS TO SELECTED PROBLEMS