Nanometer CMOS (Hardcover)

The Evolution of Silicon Electronics
Introduction
The Early Days of Semiconductor Electronics
Moore’s Law
Further trends and the ITRS
Improved MOSFET Designs
MOSFETs for High-Frequency Operation?

MOSFET Theory
Introduction
MOS Fundamentals
MOSFET Current? Voltage Characteristics

Nanoscale MOSFETs
MOSFET Scaling Theory
Nanoscale MOSFET Concepts ? An Overview
Nanoscale Bulk MOSFETs
Mobility Enhancement Techniques
High-k Dielectrics and Metal Gates
Nanoscale Single-Gate SOI MOSFETs
Nanoscale Multiple-Gate MOSFETs
MOSFETs with Alternative Channel Materials
The Effect of Multiple Technology Boosters

MOSFETs for RF Applications
Introduction
RF Transistor Figures of Merit
Small-Signal Equivalent Circuits
RF MOSFET Design and Performance

Overview of Nanometer CMOS Technology
Introduction
Lithography
Plasma Etching
Thin Film Formation Techniques
Junction Formation
Interconnects
Summary

Outlook
Introduction
Critical Scaling Issues
Will There Be a Mainstream Beyond-Scaling, Post-CMOS Technology?

Appendix A: Frequently Used Symbols
Appendix B: Physical Constants and Unit Conversions
Appendix C: Important Properties of Si and SiO₂
Appendix D: Carrier Concentrations, Energy, and Potential
Appendix E: Frequently Used Abbreviations