CMOS Nanoelectronics: Innovative Devices, Architectures, and Applications (Hardcover)

General Introduction
Part 1: Integration of Multigate Devices (FinFET)
Introduction to Multigate Devices and Integration Challenges
Patterning Requirements for Multigate Devices
Gate Stack Design
Source/Drain Design: Reduction of Parasitic Resistance

Part 2: Circuit-Related Aspects
Variability and Its Implications for FinFET SRAM
High T Performance of FinFET
ESD and Multigate Devices

Part 3: Beyond FinFET
The Junctionless Nanowire Transistor
Transport in Nanostructures
Transport Spectroscopy of a Single Dopant in a Gated Silicon Nanowire
Thermionic Theory as a Tool for the Study of Transport in Doped and Undoped Si n-FINFETs Scaled Up to the Full Body Inversion Limit