Tribology in Chemical-Mechanical Planarization (Hardcover)

INTRODUCTIONBrief History of TribologyCMP Technology Development Basic CMP ProcessSURFACE PROPERTIESPhysical and Mechanical Characteristics of SurfacesWear-Contact of Material StructureSurface Characterization TechniquesCMP DefectsFRICTIONBasics of FrictionLaws of Friction Friction Due to AdhesionFriction Due to Abrasion - PloughingFriction Due to DeformationFlash TemperaturesFriction in CMPLUBRICATIONLubrication RegimesLubrication FundamentalsBoundary Lubrication in CMPLubrication Behavior in Post-CMP CleaningAdditive Classification for Slurry DesignWEAR IN CMPBasics of WearSlurry ParticlesPad WearFORCE TRANSMISSIONCMP Tour de ForceElastomeric FoamsCMP PADSPad Surface CharacteristicsSlurry DepletionPad ConditioningPOST-CMP CLEANING