Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (Hardcover, 2010)

Preface. MEMS/NEMS Technologies And Applications. History of Early Research on MEMS in Russia (U.S.S.R.); V. Vaganov.- Challenges of Complete CMOS/MEMS Systems Integration; V. Vaganov.- MEMS for Practical Applications; M. Esashi.- Nanochip: A MEMS-Based Ultra-High Data Density Memory Service; N. Belov et al.- Low Cost Silicon Coriolis' Gyroscope Paves the way to Consumer IMU; B. Vigna et al.- Microwave and Millimetre Wave Devices Based on Micromachining of Ill-V Semiconductors; A. Muller et al.- Monocrystalline-Silicon Microwave MEMS Devices Multi-Stable Switches, W-Band Phase Shifters, and MEMS Tuneable Frequency-Selective Surfaces; J. Oberhammer et al.- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites; V.G. Golubev.- MEMS Device And Reliability Physics. Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams; S.Krylov, N. Dick.- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS; P.G. Steeneken, J. Stulemeijer.- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches; G. Papaioannou.- Advanced Processes And Materials. Development of DRIE for the Next Generation of MEMS Devices; H. Ashraf et al.- Low-Temperature Processes for MEMS Device Fabrication; J. Kiihamaki et al.- High Temperature Stable Au/Sn and Cu/Sn Interconnects for 3D Stacked Applications; N. Hoivik et al.- 3D integration of MEMS and IC: Design, Technology and Simulations; M.M.V. Taklo et al.- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices; G. Liu et al.- Modeling of Dry Etching in Production of MEMS; A. Rusakov et al.- XRD and Raman Study of Low Temperature AlGaAs/GaAs(100) Heterostructures; P. V. Seredin et al.- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys; 0. Adiguzel.- Sensors. Smart Sensors: Advantages and Pitfalls; P.J. French.-Vertically Integrated MEMS SOl Composite Porous Silicon-CrystallineSilicon Cantilever-Array - Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents; S. Stolyarova et al.- Integration of Diverse Biological Materials in Micro/Nano Devices; R. Ghodssi et al.-Force Sensing Optimization and Applications; J . C. Doll et al.- Using Parametric Resonance to Improve Micro Gyroscope Robustness; L. Oropeza-Ramos et al.- Subject Index. Authors Index.