반도체의 부가가치를 올리는 패키지와 테스트

01 반도체 테스트의 이해

01.  반도체 후공정 ······················································ 5
02.  테스트의 종류······················································ 8
03.  웨이퍼 테스트 ···················································· 10
EPM ································································ 13
웨이퍼 번인······················································· 13
테스트 ····························································· 14
리페어······························································ 15
04.  패키지 테스트 ···················································· 16
TDBI································································ 17
테스트 ····························································· 18
외관 검사·························································· 18

02 반도체 패키지의 정의와 역할

01.  반도체 패키지의 정의········································· 25
02.  반도체 패키지의 역할 ········································ 26
03.  반도체 패키지의 개발 트렌드····························· 28
04.  반도체 패키지 개발 과정 ··································· 31

03 반도체 패키지의 종류

01.  반도체 패키지의 분류······················································ 39
02.  컨벤셔널 패키지·······························································41
플라스틱 패키지 - 리드프레임 타입 패키지··························41
플라스틱 패키지 - 서브스트레이트 타입 패키지 ·················· 43
세라믹 패키지 ································································ 46
03.  웨이퍼 레벨 패키지························································· 47
웨이퍼 레벨 패키지 ························································· 47
재배선··········································································· 56
플립 칩·········································································· 58
04.  적층 패키지····································································· 66
패키지 적층 ··································································· 67
칩 적층 - Chip Stack with Wire Bonding··························· 70
실리콘 관통 전극 - Chip Stack with TSV ··························· 73
05.  시스템 인 패키지····························································· 86

04 반도체 패키지 설계와 해석

01.  반도체 패키지 설계 ························································· 97
02.  구조 해석······································································· 101
휨 해석········································································ 104
솔더 접합부 신뢰성 ······················································· 106
강도 해석····································································· 108
03.  열 해석 ·········································································· 109
04.  전기 해석 ······································································113

05 반도체 패키지 공정

01.  컨벤셔널 패키지 공정·······································123
백 그라인딩 ····················································124
웨이퍼 절단·····················································127
다이 어태치 ····················································131
인터커넥션······················································137
몰딩·······························································143
마킹·······························································144
트리밍 – 리드프레임·········································146
솔더 도금 – 리드프레임·····································147
성형 – 리드프레임············································147
솔더 볼 마운팅 – 서브스트레이트 ·······················148
싱귤레이션 - 서브스트레이트 ····························152
02.  웨이퍼 레벨 패키지 공정··································153
포토 공정 ·······················································156
스퍼터링 공정 ················································· 161
전해도금 공정 ·················································163
습식 공정 – PR 스트립과 금속 에칭 ····················166
팬인 WLCSP 공정············································167
솔더 볼 마운팅 공정·········································168
플립 칩 범프 공정 ············································169
재배선 공정 ····················································171
팬아웃 WLCSP 공정·········································172
실리콘 관통 전극 패키지 공정···························· 174
03.  검사와 측정······················································187
검사·······························································187
측정·······························································192

06 반도체 패키지 재료

01.  컨벤셔널 패키지 재료···················································· 208
리드프레임 ·································································· 208
서브스트레이트···························································· 210
접착제········································································· 217
에폭시 몰딩 컴파운드···················································· 222
솔더 ··········································································· 225
테이프········································································· 228
와이어 ········································································ 229
포장 재료 ···································································· 230
02.  웨이퍼 레벨 패키지 재료··············································· 231
포토 레지스트 ······························································ 231
도금 용액····································································· 234
PR 스트립퍼································································· 235
에천트········································································· 237
스퍼터 타깃 ································································· 238
언더필········································································· 238
캐리어와 접착제, 마운팅 테이프······································ 240

07 반도체 패키지 신뢰성

01.  신뢰성 의미 ··································································· 247
02.  JEDEC 기준··································································· 248
03.  수명 신뢰성 시험··························································· 253
EFR ············································································ 253
HTOL ········································································· 254
LTOL ·········································································· 255
HTSL ·········································································· 256
LTSL··········································································· 257
Endurance ····················································· 257
Data Retention··············································· 258
04.  환경 신뢰성 시험·············································· 259
Preconditioning·············································· 259
TC ································································· 263
TS ································································· 268 THS······························································· 268 PCTP······························································269
UHAST ·························································· 270 HAST····························································· 271 HALT····························································· 272
05.  기계적 신뢰성 시험·········································· 273
충격································································274
진동······························································· 275
구부림 ··························································· 275
비틀림·····························································276

08 반도체 용어해설​

용어해설·································································· 282