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· 제목 : Semiconductor Micromachining, Fundamental Electrochemistry and Physics (Hardcover, Volume 1)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780471966814
· 쪽수 : 332쪽
· 출판일 : 1998-05-08
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780471966814
· 쪽수 : 332쪽
· 출판일 : 1998-05-08
목차
Volume 1
Electrochemical and Photochemical Properties of Semiconductors
S. Morrison
Chemical and Electrochemical Etching of Semiconductors
J. Kelly and D. Vanmaekelbergh
Photoetching of III-V Semiconductors: Basic Photoelectrochemical Principles
W. Plieth and S. Wetzenstein
Influence of Photoelectrochemical Etching on Electronic Properties of Semiconductor Surfaces
R. Tenne
Surface Conditioning of Silicon by Photoelectrochemical Etching
C. Levy-Clement
Electrochemical Conditioning of Silicon: Surface Analyses and Electronic Implications
H. Lewerenz and H. Jungblut
The Formation of Porous Silicon
D. Riley
Index
