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· 제목 : Semiconductor Micromachining, Techniques and Industrial Applications (Hardcover, Volume 2)
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780471966821
· 쪽수 : 408쪽
· 출판일 : 1998-05-08
· 분류 : 외국도서 > 기술공학 > 기술공학 > 전자공학 > 반도체
· ISBN : 9780471966821
· 쪽수 : 408쪽
· 출판일 : 1998-05-08
목차
Volume 2
Anisotrophy and the Micromachining of Silicon
A. Campbell, et al.
Etch Stops
S. Collins
Photonic Integrated Circuits, Technology and Concepts
R. Matz
Monolithically Integrated Sensors for Mechanical Quantities in Standard CMOS Processing
H. Offereins, et al.
Silicon on Insulators
C. Harendt and G. Roos
Integrated Sensors and Actuators
N. Najaft
Smart Sensors
N. Najaft and J. Moyne
Anodic Oxidation of Silicon as a Low-Temperature Passivation Technique
G. Mende
Micromachined Optoelectronic Structures and Devices
P. Deimel
Wet and Dry Etching: A Comparison in the Context of Solid State Electronics Applications
K. Bachmann
Index
