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· 제목 : Diamond Films : Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth (Hardcover)
· 분류 : 외국도서 > 과학/수학/생태 > 과학 > 화학 > 유기화학
· ISBN : 9780080447230
· 쪽수 : 348쪽
· 출판일 : 2005-11-30
· 분류 : 외국도서 > 과학/수학/생태 > 과학 > 화학 > 유기화학
· ISBN : 9780080447230
· 쪽수 : 348쪽
· 출판일 : 2005-11-30
목차
1. Overview of Oriented Growth
2. Diamond - Structure and CVD Growth
3. Microwave Plasma CVD Reactors
4. Other CVD Reactors
5. Crystal Orientations and Film Surface Morphology
6. Formation of Twins
7. Homoepitaxial Growth
8. Surface Reconstruction
9. Epitaxial Growth on cBN, Ni, and Other Substrates
10. Diamond Nucleation
11. HOD Film Growth
12. Oriented Growth on Noble Metals
13. Properties and Applications of Heteroepitaxial Diamond Films
14. Conclusion
APPENDICES
- Notations and units
- Plasma
- Properties of diamond and other semiconducting materials
- Reconstruction of diamond surfaces
- Materials constants
- Phase diagrams of carbon and metals
- Carbon solubilities in metals
- Biasing and growth conditions for diamond growth
