Plasma Electronics : Applications in Microelectronic Device Fabrication (Hardcover, 3 ed)

CHAPTER 1, Introduction CHAPTER 2, Historical progress related to Plasma Electronics CHAPTER 3, Phenomenological Description of the Charged Particle Transport CHAPTER 4, Macroscopic Plasma Characteristics CHAPTER 5, Elementary Processes in Gas Phase and on Surfaces CHAPTER 6 The Boltzmann Equation and Transport Equations of Charged Particles CHAPTER 7, General Properties of Charged Particle Transport in Gases CHAPTER 8, Modeling of Nonequilibrium (Low-Temperature) Plasmas CHAPTER 9, Numerical Procedure of Modeling CHAPTER 10 Capacitively Coupled Plasma CHAPTER 11 Inductively Coupled Plasma CHAPTER 12 Magnetically Enhanced Plasma CHAPTER 13 Plasma Processing and Related Topics CHAPTER 14 Atmospheric-Pressure, Low-Temperature Plasma CHAPTER 15 Reactive Electronegative Plasmas for Surface Processes. References. Index.