Handbook of Humidity Measurement, Volume 2 : Electronic and Electrical Humidity Sensors (Hardcover)

Electronic and Electrical Humidity Sensors. Part 1: Electronic and Electrical Humidity Sensors and Their Configuration. Capacitive humidity sensors. Conventional capacitive humidity sensors. Capacitance sensor with interdigitated electrodes. Cantilever based capacitance sensors.Al2O3-based capacitance sensors. Resistive humidity sensors. Gravimetric humidity sensors. QCM ?based sensors. SAW ?based sensors. Microcantilever?based sensors. Hygrometric humidity sensors. Thermal conductivity-based hygrometer. Field emission-based humidity sensors. Integrated humidity sensors. Part 2: Humidity-Sensitive Materials. Polymers. Metal oxides. Porous semiconductors (Si, SiC). Carbon-based materials. Other materials. Part 3: Technologies and Collateral Materials. Deposition and synthesis of sensitive materials. Thick film technology. Thin film technology. Polymer technologies. Silicon porosification.Porous Al2O3. Micromachining in sensor technology. Bulk micromachining. Surface micromachining. Dry etching. Micromachining using porous silicon.Platforms of humidity sensors. Conventional platforms. Flexible platforms. Cantilevers. Platforms for QCM and SAW-based humidity sensors. Planar QCM. Features of humidity sensor fabrication. Materials for electrodes. Packaging of humidity sensors. Protective filters. Part 4: Calibration and Market of Humidity Sensors. Calibration of humidity sensors. Climatic chamber. Humidity generator. Salt solutions. Typical sources of errors in humidity calibration. Humidity sensor market. Companies in the sensor market. Parameters of sensors on sensor market