Graphene and VLSI Interconnects (Hardcover)

1. Graphene-Copper Handshake 1.1. Importance of Interconnections in VLSI 1.2. Copper is Running Out of Steam 1.3. Graphene As a Solution 1.4. Properties and Applications of Graphene 1.5. Summary References 2. Graphene Synthesis Methods 2.1. An overview of the existing methods 2.2. Drawbacks of Current Methods with Respect to Applications in VLSI Interconnect Fabrication 2.3. Summary References 3. Novel and Improved Graphene Synthesis Method 3.1. Exploration of Carbon Sources 3.2. Amorphous Carbon As a Promising Candidate: A PVD-Based Synthesis 3.3. Growth Mechanism of PVD-Based Graphene 3.4. Summary References 4. Statistical Approach to Identify Key Growth Parameters of the Novel Graphene Growth PVD Processes 4.1. Brief History and Need of DoE 4.2. Importance of DoE 4.3. Applications of DoE 4.4. Illustration of DoE for the Novel PVD Graphene Synthesis 4.5. Summary of Graphene Growth using DoE References 5. Copper?Graphene Interconnect 5.1. Introduction 5.2. Electrical and Thermal Characteristics of Graphenated Copper 5.3. Compatibility of Graphenated Interconnect to Current-Integrated Circuit Back End Processes 5.4. A Novel Copper?Graphene?Copper Interconnect and Its Potential Performance 5.5. Mechanism of Electroless Cu Deposition on Graphenated Cu 5.6. Summary References