Thin Film Materials : Stress, Defect Formation and Surface Evolution (Hardcover)

1. Introduction and overview; 2. Film stress and substrate curvature; 3. Stress in anisotropic and patterned films; 4. Delamination and fracture; 5. Film buckling, bulging and peeling; 6. Dislocation formation in epitaxial systems; 7. Dislocation interactions and strain relaxation; 8. Equilibrium and stability of surfaces; 9. The role of stress in mass transport.